SVC TechCon 2017

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Alloy Cu Films with Improved Characteristics for Electronic Applications

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Gary Rozak ; Helia Jalili ; Qi Zhang
Copper is widely used in microelectronic devices for its low manufacturing cost and high electronic conductivity. Flat Panel Display industries, in... More...

Atmospheric Vapor Deposition and Atmospheric Pressure Inductively Coupled Plasma Focused Beam System for Large-scale Manufacturing of Solid Oxide Fuel Cells with Low Operation Temperature

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Anna Ryaboy ; Tatiana Kerghner ; Yuri Glukhoy
The numerous advantages of the solid oxide fuel cells with low operation temperature (LT-SOFCs)   and  many challenges  for ren... More...

Avoiding nodule growth in reactive DMS of silicon based dielectric films

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Ioana Luciu ; Moritz Heintze
The growth of nodules on the target surface can become a serious problem in the reactive sputtering of oxide films.  They can be seen as local... More...

Deposition of Carbonaceous Siloxane Films via Atmospheric Pressure PECVD

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Andres A. Bujanda ; J. Derek Demaree ; Joseph R. Palmeri
Transparent SiO2 coatings have been used in applications ranging from microelectronics, optical applications, antireflection coatings, and as barri... More...

Deposition of Stable and High Concentration of Carboxylic Acid Functional Groups onto Silicon Surface via a Tailored Remote Atmospheric Pressure Plasma Process

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Allan Matthews ; Frank R. Jones ; Ko-Shao Chen ; Wei-Yu Chen
Processes to introduce carboxylic acid functional groups onto surfaces have been widely applied on various applications, such as molecular grafting... More...

Determination of structural, mechanical and corrosion properties of titanium dioxide thin films formed on Ti6Al4V surface by using magnetron sputtering processes (conventional and with modulated plasma)

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Agata Poniedzialek ; Damian Wojcieszak ; Danuta Kaczmarek ; Jaroslaw Domaradzki ; Malgorzata Kalisz ; Marcin Grobelny ; Michal Mazur
Titanium oxide film is a very important material due to its multifunctional application in photocatalysis, hydrophobic material, photovoltaic cells... More...

Development and Implementation of a High Vacuum Equipment Trainer for Technician Education

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Delmer L. Smith BES ; Nancy Louwagie MS
For nearly 20 years, the Vacuum and Thin Film Technology program at Normandale Community College (NCC) has been preparing people to work in the vac... More...

Evaluating mechanical properties of complex material structures from a new combination of calotte grinding and indentation tests

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Nick Bierwisch ; Norbert Schwarzer
Depending on the material structure (e.g. layer thicknesses, Young’s moduli and yield strength ratios …) and the indentation device ca... More...

Excellent adhered thick DLC coatings on high-speed steel deposited by ion-beam-assisted plasma immersion ion implantation & deposition and high-power impulse magnetron sputtering pretreatment

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Feng Pan ; Liangliang Liu ; P.K. Chu ; Ricky K Y Fu ; Xiaokai An ; Xiubo Tian ; Zhongzhen Wu
Diamond-like carbon (DLC) films have attracted much attention recently due to their excellent properties. Unfortunately, the poor adhesion caused b... More...

Exploration of asymmetrical turnaround erosion on rotary cathodes

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Patrick Morse
Rotary cathodes often produce deeper erosion grooves within one turnaround faster than the other. It has been observed that extra target erosion wi... More...

Extending the volume and processing area of atmospheric pressure plasma jets

02 May 17
12:00 AM - 12:00 AM
Speaker(s): D.R. Boris ; E.D. Gillman ; G.M. Petrov ; M.H. Helle ; S.C. Hernández ; S.G. Walton ; Tz. B Petrova
Atmospheric pressure plasmas have certain advantage in materials synthesis and processing that are not available with other approaches including lo... More...

Hybrid co-deposition of nano-crystalline Si3N4:TiN thin films

02 May 17
12:00 AM - 12:00 AM
Speaker(s): John G. Jones Ph.D. ; John T. Grant Ph.D. ; Lirong Sun Ph.D. ; Neil R. Murphy Ph.D.
Nitride nanocomposite thin films, especially Si-Me-N (Me=Ti, Zr, Hf), have generated significant attention as a result of their robust thermal and ... More...

Influence of reactive magnetron sputtering process parameters on structural, mechanical and corrosion properties of hafnium dioxide thin films deposited on titanium alloy surface

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Malgorzata Kalisz
Hafnium dioxide (HfO2) thin film is characterized by high dielectric constant, large band-gap and relatively high thermal stability. However, it sh... More...

Influence of Thin-Film Properties on the Reliability of ultra-thin Glass

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Falk Naumann ; Georg Lorenz ; Jasper Westphalen ; Manuela Junghaehnel
Ultra-thin glass (UTG) with thicknesses less than 200 µm is a new flexible substrate material for electronics and display applications. Super... More...

Lab-scale vacuum equipment for HJT solar cell production

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Eugene Khokhlov ; Gennady Zhavnerko ; Michail Reginevich ; Sergey Nastochkin ; Stanislau Herasimenka ; Vladimir Shiripov
Solar cells based on a-Si:H/c-Si heterojunction (HJT) is becoming a prime candidate for future photovoltaic. The advantages and limitations of var... More...

Micro-structure investigations on gas flow sputtered thermal barrier coatings

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Günter Bräuer ; J. Petersen ; Jessica Gerstenberg ; Joachim Rösler ; K. Ortner ; N. Rösemann ; Ralf Bandorf
Zirconia based thermal barrier coatings are usually fabricated on high-temperature gas turbine components by Electron-Beam PVD or by thermal spray ... More...

Nanostructuring on polymer surfaces by magnetron plasma treatment

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Cindy Steiner ; John Fahlteich ; Juliane Fichtner
Stochastic nanostructured polymer surfaces exhibit superior properties like enhanced optical transmittance and soil-resistance as well as improved ... More...

OCP Broadband built-in fully automatized Broadband Optical Monitor with ultimate characteristics

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Alexander Turban ; Artem Artamonov ; Eugene Khokhlov
IZOVAC group specializes in precision thin film optical coatings deposition. Accumulated experience allowed us to create optical monitoring complex... More...

Self-organized nanostructure of polymer films by linear ion beam irradiations for flexible devices

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Do-Geun Kim ; Eunyoen Byun ; Seunghun Lee ; Sunghun Jung
Nanostructured surfaces of flexible polymers have been required for enhancing optical transparency, electrode adhesion and anti-fouling of flexible... More...

Sputtered metal alloys for automotive applications

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Colin Hall ; Drew Evans ; Eric Charrault ; Peter Murphy
The use of polymers to replace traditional materials in the automotive, aerospace and other industries is continuing at a high pace. Polymers offer... More...

Surface Morphology of Gold thin films using RF Magnetron Sputtering

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Caleb Glaser ; Moniruzzaman Syed ; Muhtadyuzzaman syed
Gold (Au) thin films are offering various applications such as nanosensors and biosensing devices. It is crucial to understand the growth mechanism... More...

Transparent and conductive properties of Nb doped TiO2 films prepared by magnetron sputtering

02 May 17
12:00 AM - 12:00 AM
Speaker(s): Cuiqing Jiang ; Feng Pan ; P.K. Chu ; Ricky K Y Fu ; Shu Xiao ; Xiaoyang Yang ; Zhongzhen Wu
Nb doped TiO2 (NTO) thin films have been popular studied because of the significant potential to instead Indium Tin Oxide (ITO) as a Transparent Co... More...

Technology Forum Breakfast

02 May 17
7:00 AM - 8:15 AM
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Coatings for Energy Conversion and Related Processes (Ballroom BC)

02 May 17
8:30 AM - 10:40 AM
Speaker(s): Carl Lampert ; Claes G. Granqvist
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INVITED: Roll-to-roll processing of flexible electronics: transistors, circuits and devices (Room 553AB)

02 May 17
8:30 AM - 9:10 AM
Speaker(s): Hazel E. Assender
The breakthrough of flexible electronics depends upon suitable large-scale manufacturing routes, likely requiring very low cost, high-throughput pr... More...

INVITED: The Future of Energy Storage for Vehicle Applications (Ballroom BC)

02 May 17
8:30 AM - 9:10 AM
Speaker(s): Marca M. Doeff Ph.D
The year 2016 marked the 25th anniversary of Sony’s announcement of the commercialization of Li-ion batteries. This not only precipitated a r... More...

Ionisation Enhancement Control for Magnetron Sputtering Processes (Room 554AB)

02 May 17
8:30 AM - 8:50 AM
Speaker(s): F. Papa ; Florian Meyer ; H. Li ; J. Brindley ; J. Housden ; L. Espitalier ; S. Banfield ; Steven Stanley ; T. Sgrilli ; V. Bellido-Gonzalez
Hot Filament technology has been used for ionisation enhancement of different PVD technologies like Electron Beam Evaporation (eBE) and Magnetron S... More...

Plasma Processing I (Room 554AB)

02 May 17
8:30 AM - 11:00 AM
Speaker(s): S.G. Walton
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Protective, Tribological and Decorative Coatings III (Ballroom DE)

02 May 17
8:30 AM - 11:00 AM
Speaker(s): Dave Doerwald ; Ton Hurkmans
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Trends and Challenges in PVD Decorative coatings (Ballroom DE)

02 May 17
8:30 AM - 8:50 AM
Speaker(s): Jose A. García
IK4-TEKNIKER From more than two decades PVD coatings have been widely employed for different decorative applications. Ceramic, metallic and plastic... More...

WebTech Roll-to-Roll Coatings for High-End Applications II (Room 553AB)

02 May 17
8:30 AM - 11:00 AM
Speaker(s): Alberto Argoitia ; Chris Stoessel
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PACVD SiOx Coatings Deposited with Microwave Technology (Ballroom DE)

02 May 17
8:50 AM - 9:10 AM
Speaker(s): Dave Doerwald ; Ivan Kolev ; Jeroen Landsbergen ; Roel Tietema ; Vishal Khetan
SiOx thin films are widely spread in various applications, such as semiconductor manufacturing, glass industry, sensors, decorative coatings. The i... More...

Recapture of ion-induced secondary electrons emitted from magnetron targets (Room 554AB)

02 May 17
8:50 AM - 9:10 AM
Speaker(s): Cedric Bedoya ; Donald J McClure ; Edward J. Anderson
The recapture of ion-induced secondary electrons emitted from magnetron targets is a significant but underappreciated part of our sputtering proces... More...

Controlling the ion to neutral ratio by measuring the plasma emission in a non-reactive HIPIMS process (Room 554AB)

02 May 17
9:10 AM - 9:30 AM
Speaker(s): Günter Bräuer ; Holger Gerdes ; Julius Rieke ; Michael Vergöhl ; Ralf Bandorf ; Thomas Schütte
High Power Impulse Magnetron Sputtering is nowadays a well-known technology for influencing the growing thin film by a high peak current and is inc... More...

Novel coatings deposited by modulated pulsed power magnetron sputtering for PEM fuel cell and electrolyser bipolar plates (Ballroom BC)

02 May 17
9:10 AM - 9:30 AM
Speaker(s): Anders Oeedegard ; Javier Barriga ; Lucia Mendizabal ; Ole Edvard Kongstein ; Sigrid Lædre
In order to be able to take full advantage of intermittent renewable energy sources, the energy needs to be stored. This energy can be stored as hy... More...

Sponsored Student: Flexographic Patterning in Vacuum of Sacrificial Oil for Aluminium Contacts of Organic Transistors (Room 553AB)

02 May 17
9:10 AM - 9:30 AM
Speaker(s): Hazel E. Assender ; Thomas Cosnahan
Combining vacuum deposition of functional materials with patterning is crucial for low cost roll-toroll production of devices such as transistors, ... More...

Tool coating systems and modified diamond-like carbon coatings (a-C:H:X) for polymer processing (Ballroom DE)

02 May 17
9:10 AM - 9:30 AM
Speaker(s): Christian Stein ; Günter Bräuer ; Ingmar Bialuch ; Klaus Bewilogua ; Martin Keunecke ; Martin Weber
The plastic processing industries have numerous applications for wear resistant anti-adhesion coatings. Such coatings avoid deposits on extrusion o... More...

Break (Room 554AB)

02 May 17
9:30 AM - 9:40 AM
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Break (Room 553AB)

02 May 17
9:30 AM - 9:40 AM
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Break (Ballroom BC)

02 May 17
9:30 AM - 9:40 AM
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Break (Ballroom DE)

02 May 17
9:30 AM - 9:40 AM
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Barrier Films for Quantum Dot Encapsulation (Room 553AB)

02 May 17
9:40 AM - 10:00 AM
Speaker(s): Adam Nebraska ; Christopher Lyons ; David Lamb ; David Rowe ; Eric Jostes ; Eric Nelson ; Joseph Pieper ; Joseph Spagnola ; Scott J. Jones
3MTM Quantum Dot Enhancement Films (QDEF) increase the color gamut of standard LCD displays by roughly 50% through optical down conversion of blue ... More...

Free charge carriers in hydrogen doped ZnO thin films deposited by pulsed DC magnetron sputtering (Ballroom BC)

02 May 17
9:40 AM - 10:00 AM
Speaker(s): Andreas N. Panckow ; Bradley P. Tinkham ; Clement David ; Pavel Prunici
ZnO thin films are used as both highly conductive TCO electrode in different optoelectronic devices and as highly transparent, highly resistive lay... More...

Inspired from telecommunication amplifiers to plasma power supplies (Room 554AB)

02 May 17
9:40 AM - 10:00 AM
Speaker(s): Christian Bock ; Christian Thome ; Daniel Krausse ; Modashree Rangesh ; Pawel Grabowski ; Tobias Keller
Layers for solar cell manufacturing, display technology and semiconductor production require precise and efficient PVD and PECVD coatings as well a... More...

INVITED: New generation of ceramic thin film coatings for implants and medical instruments (Ballroom DE)

02 May 17
9:40 AM - 10:20 AM
Speaker(s): Antonio Santana
The number of applications involving thin film coatings on implants and surgical instruments/tools have been steadily increasing  generating g... More...

High Density HAD Plasma Supported Aluminum Oxide Deposition for Transparent Barriers with Superior Mechanical and Gas Diffusion Properties (Room 553AB)

02 May 17
10:00 AM - 10:20 AM
Speaker(s): Christof Kurthen ; Gerd Hoffmann ; Neil Morrison ; Nicolas Schiller ; Peter Olbrich ; Roland Trassl ; Steffen Straach
Vacuum deposition of thin film gas diffusion barrier layers has been in high-volume production for over 60 years in the food packaging industry. Th... More...

Novel Plasma Reactor Principle for Amorphous Silicon Deposition enabling High Efficiency Energy Conversion (Ballroom BC)

02 May 17
10:00 AM - 10:20 AM
Speaker(s): Klaus Ruhmer ; Sebastian Gatz
Solar modules have reached the point of grid parity. Energy produced from sunlight is as cost efficient as traditional techniques. The quest for mo... More...

The role of the positive voltage reversal in HIPIMS on plasma discharges and coating properties (Room 554AB)

02 May 17
10:00 AM - 10:20 AM
Speaker(s): Ambiorn Wennberg ; Gerhard Eichenhofer ; Ivan Fernandez
The application of a short positive voltage reversal right after the negative HIPIMS pulse is studied in this paper. The most obvious direct advant... More...

INVITED: From Target to Substrate - About the Generation of Energetic Ions in HiPIMS Discharges (Room 554AB)

02 May 17
10:20 AM - 11:00 AM
Speaker(s): Achim von Keudell
High power magnetron sputtering (HiPIMS) discharges generate ions with high kinetic energies in comparison to conventional dc magnetron sputtering.... More...

Pressure-controlled Micro-arc Treatment on Aluminum (Ballroom DE)

02 May 17
10:20 AM - 10:40 AM
Speaker(s): Chia Hung Chung ; Hou Jen Chu ; Ju Liang He ; Yung Cheng Liu
Micro-arc treatment to form ceramic layer relies on the local arc events occurring upon the specimen surface. In spite of such a well-developed atm... More...

Sponsored Student: Roll-to-roll deposition of permeation barrier layers using a rotatable dual magnetron system (Room 553AB)

02 May 17
10:20 AM - 10:40 AM
Speaker(s): Anika Himmler ; Gerald Gerlach ; Matthias Fahland ; Olaf Zywitzki ; Tobias Vogt ; Volker Linss
High performance permeation barrier coatings are usually multilayer stacks consisting of inorganic and organic layers. Besides the water vapor tran... More...

Studies on the Electro-chromic properties of Reactive DC Magnetron sputtered Tungsten oxide (WO3) thin films with Neon as the sputter gas (Ballroom BC)

02 May 17
10:20 AM - 10:40 AM
Speaker(s): Aryasomayajula Subrahmanyam ; Uday Kumar Kanapuram Post Doctoral Fellow
Tungsten oxide (WO3) thin films are well established materials for electrochromics. Among the various growth techniques adopted, reactive DC Magnet... More...

ABACO: a thin film revolution, the decisive antibacterial coating (Ballroom DE)

02 May 17
10:40 AM - 11:00 AM
Speaker(s): Fabrizio Pitacco ; Gerardo Coletta ; Michele Tosti ; Tommaso Ceccatelli Martellini
In recent years, the role of bacterial contamination causing serious problems to human life, has emerged. Many sectors are affected by this phenome... More...

Tuning the transmittance and the electrochromic behavior of WO3-based nanostructured thin films by glancing angle deposition (Ballroom BC)

02 May 17
10:40 AM - 11:00 AM
Speaker(s): Bin Wang ; Hongji Qi ; Jianda Shao
In recent years, WOx electrochromic thin films by glancing angle deposition (GLAD) have been demonstrated to be preponderant due to the favorable d... More...

KEYNOTE: Plasma Medicine: Fundamentals and Application to Cancer Vaccination (Room Exhibit Hall)

02 May 17
11:10 AM - 11:50 AM
Speaker(s): Alexander Fridman
The newest results obtained by researchers of A.J. Drexel Plasma Institute on direct application of non-thermal plasma for direct treatment of diff... More...

Poster Session

02 May 17
2:00 PM - 5:00 PM
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2.45 GHz Microwave Plasma Source Arrays for Large Area Deposition, Etch, and Surface Modification (Room Exhibit Hall)

02 May 17
3:00 PM - 3:20 PM
Speaker(s): Alexander D. Welsh ; Juslan Lo ; Louis Latrasse ; Marilena Radoiu ; Philippe Guillot ; Robert E. Weiss
New elementary microwave plasma sources provide large-scale substrate modification and film deposition capabilities with high density, uniform plas... More...

Heureka! Session (Room Exhibit Hall)

02 May 17
3:00 PM - 5:00 PM
Speaker(s): Hana Barankova
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Cylindrical Magnetron Sputtering of Antireflection Coatings on Three Dimensional Substrates (Room Exhibit Hall)

02 May 17
3:20 PM - 3:40 PM
Speaker(s): David Glocker ; John Lanzafame ; Nick Franzer ; Rob Belan ; Sean Armstrong
Precision optical coatings having excellent thickness uniformity are needed on substrates with a variety of shapes. That typically requires a comb... More...

Mirror Coating at the Large Synoptic Survey Telescope (Room Exhibit Hall)

02 May 17
3:40 PM - 4:00 PM
Speaker(s): Andreas Purath ; Norman Müller
Made-to-order stripping and vacuum coating solutions for special applications are realized by Von Ardenne (VA), the global leader in vacuum technol... More...

Performance Of A Radio Frequency Plasma Ion Source (Room Exhibit Hall)

02 May 17
4:00 PM - 4:20 PM
Speaker(s): Andrew R. Klumph ; Craig Anthony Outten Ph.D. ; David Walter Konopka ; George D. Papasouliotis ; Karl Williams
A radio frequency, inductively coupled plasma (RFICP), gridded ion source was developed to produce energetic ion beams for use in ion assisted depo... More...

Self-sputtering initiation in high power impulse magnetron discharge on a hollow-cathodic effect enhanced cylindrical sputtering sources (Room Exhibit Hall)

02 May 17
4:20 PM - 4:40 PM
Speaker(s): Bocong Zheng ; Feng Pan ; P.K. Chu ; Ricky K Y Fu ; Shu Xiao ; Suihan Cui ; Wenchang Tan ; Zhongzhen Wu
Self-sputtering can take place in high power impulse magnetron discharge by a very high power operation because of its high ionization rate of sput... More...

Limits to the Average Reflectance in a Broadband AR Coating Design and Avoiding Local Minima in the Design Process (Room Exhibit Hall)

02 May 17
4:40 PM - 5:00 PM
Speaker(s): Ronald Willey
When attempting to optimize an optical coating, such as minimizing the reflection from a glass surface, the optimization process often stops at a d... More...