ULVAC is an international corporation that designs and manufactures systems for industrial and research applications of vacuum technology. Our products cover a broad spectrum of markets, including specific systems designed for the MEMS industry. These include: metals/Piezo-electric materials etch, DRIE etch, Ashing systems and a broad portfolio of Sputtering systems.
Product Categories
- Acceleration
- Aerospace
- Automation Sensors
- Internet of Things
- Photoelectrics
- Piezoelectric/Restrictive
- Pressure
- Signal Conditioning
- Vibration