SVC TechCon 2017

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TAC Breakfast Meeting

03 May 17
7:00 AM - 8:15 AM
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INVITED: BioTribology of Thin Film Coatings (Ballroom DE)

03 May 17
8:30 AM - 9:10 AM
Speaker(s): Anne Neville
Thin film coatings offer potential solutions to wear/corrosion of total hip replacements.  There are several tribological interfaces that can ... More...

Large Area Coatings I (Ballroom BC)

03 May 17
8:30 AM - 11:00 AM
Speaker(s): Michael Andreasen
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Plasma Processing II (Room 553AB)

03 May 17
8:30 AM - 11:00 AM
Speaker(s): Lenka Zajickova
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Plasma-surface interactions in atmospheric pressure plasmas: In situ measurements of local excitations in thin films (Room 553AB)

03 May 17
8:30 AM - 8:50 AM
Speaker(s): A. Giri ; B.M. Foley ; D.R. Boris ; E.D. Gillman ; G.M. Petrov ; J. Tomko ; P.E. Hopkins ; S.C. Hernández ; S.G. Walton ; Tz. B Petrova
The energy flux to a surface during plasma exposure and the associated surface heating are of long standing interest as they contribute to the phys... More...

Protective, Tribological and Decorative Coatings IV (Ballroom DE)

03 May 17
8:30 AM - 11:00 AM
Speaker(s): Jolanta E. Klemberg-Sapieha ; Papken Eh. Hovsepian PhD, FInstP
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Rapid Thermal Annealing applied to coatings on architectural glass: a breakthrough inspiring a full range of new highly-efficient functional coated glass products. (Ballroom BC)

03 May 17
8:30 AM - 8:50 AM
Speaker(s): Nicolas Nadaud
Starting from early eighties, the glass industry introduced the magnetron sputtering as a key-technology to functionalize large area glass (thermal... More...

Dense coating structures in magnetron sputtering using magnetically guided anodes (Ballroom BC)

03 May 17
8:50 AM - 9:10 AM
Speaker(s): Alex Azzopardi ; Frank Papa ; Heqing Li ; Oihane Hernandez ; Robert Brown ; Tommaso Sgrilli ; Tony Hart ; Victor Bellido-Gonzalez
Magnetron sputtering is a widely used vacuum plasma deposition technique which has expanded into many large area thin film deposition technology ap... More...

Monitoring and control of vacuum processes using a remote plasma emission spectroscopy based sensor (Room 553AB)

03 May 17
8:50 AM - 9:10 AM
Speaker(s): Benoit Daniel ; Frank Papa ; J. Brindley ; Victor Bellido-Gonzalez
Some form of monitoring of the vacuum is essential for the efficient operation of any vacuum processes. In particular, residual gas analysis (RGA) ... More...

Advantages of Waveform Adaptability in Low Frequency PECVD Applications (Room 553AB)

03 May 17
9:10 AM - 9:30 AM
Speaker(s): Jakub Swiatnicki ; Krzysztof Ruda ; Pawel Ozimek ; Wojciech Gajewski
Low frequency plasma enhanced chemical vapor deposition (LF-PECVD) is one of the commonly used methods for deposition antireflective (AR) coatings ... More...

Rotatable Magnetron Sputtering at the Right Pressure Point (Ballroom BC)

03 May 17
9:10 AM - 9:30 AM
Speaker(s): Jörg Oberste-Berghaus ; Niek Dewilde ; Wilmert De Bosscher
The use of rotating cylindrical magnetron sputtering for large area coating is now being well accepted for over 20 years. Besides significant impro... More...

Sponsored Student: Study of Coating Defects and their Influence on Corrosion and Tribological Properties of HIPIMS Deposited CrN/NbN Coatings (Ballroom DE)

03 May 17
9:10 AM - 9:30 AM
Speaker(s): A. Sugumaran ; Barnali Biswas ; Papken Eh. Hovsepian PhD, FInstP ; Y. Purandare
In this contribution the pulsed-DC power technology will be reviewed to point out the milestones of its development. Examples of industrial applica... More...

Break (Ballroom DE)

03 May 17
9:30 AM - 9:40 AM
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Break (Room 553AB)

03 May 17
9:30 AM - 9:40 AM
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Break (Ballroom BC)

03 May 17
9:30 AM - 9:40 AM
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INVITED: Atomic layer etching: introduction and first uses (Room 553AB)

03 May 17
9:40 AM - 10:20 AM
Speaker(s): Mike Cooke
Atomic layer etching (ALE) has been known for more than twenty years, but has recently come to prominence in semiconductor device manufacturing, wh... More...

Nanoplasmonic (“Sub-Critical”) Silver as Optically Absorptive Layers in Solar-Control Glasses (Ballroom BC)

03 May 17
9:40 AM - 10:00 AM
Speaker(s): Adam D. Polcyn ; Andrew V. Wagner ; Patrick J. Fisher ; Paul A. Medwick
Triple-silver coated glasses, such as Vitro’s Solarban® 70XL glass, block nearly all the solar infrared of the electromagnetic spectrum, ... More...

TiSiCN and TiAlVSiCN nanocomposite coatings for wear and erosion protection (Ballroom DE)

03 May 17
9:40 AM - 10:00 AM
Speaker(s): Jianliang Lin ; Ronghua Wei
The main objective of this study is to compare the structure and properties of TiSiCN and Ti(AlV)SiCN coatings deposited by sputtering a Ti target ... More...

Enhanced adhesion of hard DLC coatings on metallic and insulating substrates (Ballroom DE)

03 May 17
10:00 AM - 10:20 AM
Speaker(s): Ambiorn Wennberg ; Heqing Li ; Ivan Fernandez ; Jon Molina ; Jose Antonio Santiago ; Miguel Monclus ; Raquel Gonzalez-Arrabal ; Victor Bellido
Diamond-Like Carbon (DLC) coatings have been recognized as one of the most valuable engineering materials for various industrial applications inclu... More...

Thermochromic VO2: Performance enhancement and application opportunities (Ballroom BC)

03 May 17
10:00 AM - 10:20 AM
Speaker(s): Bill Baloukas ; Ludvik Martinu ; Simon Loquai
Chromogenic materials offering variable optical properties as a function of an external stimulus are of obvious interest. Amongst these, thermochro... More...

Corrosion Protection of Copper Using Atomic Layer Deposition (Ballroom DE)

03 May 17
10:20 AM - 10:40 AM
Speaker(s): Christopher J. Oldham ; Gregory N. Parsons ; James S. Daubert
Atomic Layer Deposition (ALD) of materials for corrosion mitigation of metal surfaces is an ongoing area of research and development. ALD is advant... More...

Low Temperature Plasma-Assisted Atomic Layer Epitaxy of III-V Nitride Semiconductors (Room 553AB)

03 May 17
10:20 AM - 11:00 AM
Speaker(s): B.P. Downey ; C.R. Eddy Jr. ; D.J. Meyer ; J.K. Hite ; L.O. Nyakiti ; M.A. Mastro ; M.J. Mehl ; N.A. Mahadik ; Neeraj Nepal ; S.B. Qadri ; V.D. Wheeler ; V.R. Anderson
The III-V nitride semiconductor family has been recognized as important for various device applications. Over the last 20-25 years, significant res... More...

Recent Developments of Optimized ITO Coatings on Ultra-Thin Flexible Glass in S2S and R2R processes (Ballroom BC)

03 May 17
10:20 AM - 10:40 AM
Speaker(s): Falk Naumann ; Georg Lorenz ; Jasper Westphalen ; Manuela Junghaehnel ; Matthias Fahland ; Thomas Preussner
Ultra-thin flexible glass as innovative flexible substrate material opens up a wide range for new and smart applications. The functionalization of ... More...

Durability and wear mechanisms of easy-to-clean coatings on glass assessed by in situ tribometry (Ballroom BC)

03 May 17
10:40 AM - 11:00 AM
Speaker(s): Bill Baloukas ; Carlo A. Kosik-Williams ; Eric L. Null ; James J. Price ; Jincheng Qian ; Jolanta E. Klemberg-Sapieha ; Ludvik Martinu ; Thomas Schmitt
Fluorine-based easy-to-clean (ETC) coatings, with contact angles higher than 110º and friction coefficients of ~0.1, are widely applied on tou... More...

KEYNOTE: Step change in Architectural Glass and Coatings (Room Exhibit Hall)

03 May 17
11:10 AM - 11:55 AM
Speaker(s): Christoph Timm
This presentation will try to inspire and foster discussion by giving examples of areas where architects see shifting needs in architectural glass.... More...

Lunch with Exhibitors

03 May 17
11:50 AM - 12:30 PM
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Fundamental Aspects of Coatings (joint session with ICMCTF) (Ballroom A)

03 May 17
1:00 PM - 3:40 PM
Speaker(s): Holger Gerdes ; Jianliang Lin
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INVITED TALK: Surface Functionalization of Biomaterials by Plasma and Ion Beam (Ballroom A)

03 May 17
1:00 PM - 1:40 PM
Speaker(s): Paul K. Chu
The relationship between biomaterials and biological matters and tissues depends on the surface properties of the biomaterials and biological respo... More...

SP-100 the fast and reliable machine for coating application in precision optics (Room Exhibit Hall)

03 May 17
1:00 PM - 1:10 PM
Speaker(s): Arturo Colautti ; Dane Clark ; Frank Breme ; Gianni Monaco ; Marc Peter ; Michael Witzany ; Steffan Gold ; Tom Godin
SP-100 from Satisloh is the perfect coating machine for application in precision optics. Thanks to its innovative concept SP-100 can coat materials... More...

Vendor Innovators Showcase (Room Exhibit Hall)

03 May 17
1:00 PM - 3:40 PM
Speaker(s): Jason A. Hrebik
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Increase target utilization and lengthen campaign runs with a pulsed dual-magnetron sputtering system (Room Exhibit Hall)

03 May 17
1:10 PM - 1:20 PM
Speaker(s): Doug Pelleymounter
Reducing material waste and extending campaign length are two sure ways to increase profitability on a metallic sputtering line. However, frequent ... More...

evolution of black thin film (Room Exhibit Hall)

03 May 17
1:20 PM - 1:30 PM
Speaker(s): Fabrizio Pitacco ; Gerardo Coletta ; Tommaso Ceccatelli Martellini
In the world of decorative thin film, black color has always been considered a technological and technical limit. In the galvanic field, to obtain ... More...

Development of a Novel Single Cold Cathode Ionization Gauge with Operation from High Vacuum to Atmosphere using Advanced Manufacturing Techniques (Room Exhibit Hall)

03 May 17
1:30 PM - 1:40 PM
Speaker(s): Glenn M. Mitchell Ph.D.
Cold cathode ionization gauges (CCIGs) have been used for decades to make high vacuum measurements on a variety of production equipment. Traditiona... More...

Linking Target Microstructure with its Sputter Performance (Ballroom A)

03 May 17
1:40 PM - 2:00 PM
Speaker(s): Christian Linke ; Dominik Lorenz ; Harald Köstenbauer ; Jörg Winkler ; Michael Eidenberger-Schober
Sputtering targets can be manufactured by various processes, including melting & casting, or powder metallurgy. The manufacturing route governs... More...

Optix - A novel wide range process gas monitor (Room Exhibit Hall)

03 May 17
1:40 PM - 1:50 PM
Speaker(s): Benoit Daniel ; Dermot Monaghan ; Frank Papa ; J. Brindley
Optix is a new wide range process gas monitor tool for detecting residual and contaminant gases as well as monitoring process gases in vacuum syste... More...

target bo backing-plate direct thermal and electrical contact (Room Exhibit Hall)

03 May 17
1:50 PM - 2:00 PM
Speaker(s): Isabelle Richardt
Sputtering pads with initial thickness of 1.5 mm and 99.95 % purity packed under vacuum used to compensate the mechanical stress of the target. The... More...

Fracture Toughness Measurement of Thin Films and Coatings through Nanoindentation (Room Exhibit Hall)

03 May 17
2:00 PM - 2:10 PM
Speaker(s): Dehua Yang
Fracture Toughness Measurement of Thin Films and Coatings through Nanoindentation Dehua Yang, Ph. D. Ebatco 7154 Shady Oak Road, Eden Prairie, MN 5... More...

Residual stress in thin films: effect of processing conditions and microstructure (Ballroom A)

03 May 17
2:00 PM - 2:20 PM
Speaker(s): Alison M Engwall ; Eric Chason ; Zhaoxia Rao
Thin films develop residual stress during their growth.  Experiments show that the magnitude depends on a balance between different kinetic pr... More...

Advanced HIPIMS solution for R&D and Process Development (Room Exhibit Hall)

03 May 17
2:10 PM - 2:20 PM
Speaker(s): Jason A. Hrebik ; Ralf Bandorf
When HIPIMS was first introduced to the thin film coating industry, it was considered an advanced technique for production applications, which woul... More...

INVITED TALK: Thin Film Strain Gages for High Performance Applications (Ballroom A)

03 May 17
2:20 PM - 3:00 PM
Speaker(s): Otto Gregory
A key enabling technology to support advanced engine component development is strain and temperature measurement. Many issues arise when attempting... More...

FHR Anlagenbau GmbH: Latest Developments in Specialized Vacuum Coating Tools with a Focus on High Precision Optical Coating (Room Exhibit Hall)

03 May 17
2:30 PM - 2:40 PM
Speaker(s): Masih Rezaee
In this talk, I will present FHR Anlagenbau GmbH’s range of products and services. FHR is one of the pioneer manufacturers of the specialized... More...

Challenges in the inline characterization of conductive thin films (Room Exhibit Hall)

03 May 17
2:40 PM - 2:50 PM
Speaker(s): Marcus Klein
Although many ITO and other TCO coating processes are well established, increasing coating process speed, higher deposition rates and lower coatin... More...

Combined Plasma and Layer Process Control System (Room Exhibit Hall)

03 May 17
2:50 PM - 3:00 PM
Speaker(s): Peter Neiss ; Thomas Schuette
PLASUS introduces its latest development to the North American and European market: the innovative combined plasma and layer process control system... More...

Building a sputtering tool with off the shelf components (Ballroom A)

03 May 17
3:00 PM - 3:20 PM
Speaker(s): James W Moore VP Engineering
Today’s economic challenges have increased research facilities and small startup companies need to bring more projects in house. The vacuum i... More...

Sputtering Components Inc. Swing CathodeTM (Room Exhibit Hall)

03 May 17
3:00 PM - 3:10 PM
Speaker(s): John Schmeling
Coating large area static substrates, common in the display industry, typically requires large planar magnetrons with moving magnet packs. Althoug... More...

Rotatable magnetrons for the functional coating market (Room Exhibit Hall)

03 May 17
3:10 PM - 3:20 PM
Speaker(s): Dermot Monaghan
The presentation will introduce two types of rotating sputter cathodes for the functional coating markets - trade-named GRSV & GRSM. The GRSV is a ... More...

Print&Play: WOSP hardware for optical thin film analysis (Room Exhibit Hall)

03 May 17
3:20 PM - 3:30 PM
Speaker(s): Wolfgang Theiss
A new method to build optical thin film analysis equipment will be presented. We combine excellent spectrometers with 3D printed mechanical parts a... More...

Quantum Contact Mechanics for Holistic Surface Optimization (Ballroom A)

03 May 17
3:20 PM - 3:40 PM
Speaker(s): Norbert Schwarzer
Optimization tools for improved protective coatings do not only require a comprehensive mechanical contact model but also need to account for the p... More...