Resilient High Temperature UHV Sealing
(Room Exhibit Hall A)
30 Apr 19
2:30 PM
-
4:00 PM
Ultra-high vacuum applications typically require all metal sealing due to outgassing and permeation concerns. Many of these systems are baked at a high temperature in order to reach the lowest base pressure and required cleanliness levels. However, high temperature bake outs can be problematic for traditional metals seals due to thermal expansion and the occasional need to have a shaped or non-circular configuration. Other critical sealing applications such as etching or thin film deposition also require a metal seal that has low outgassing and permeability – but must also be compatible with the process gasses or plasma. This presentation will discuss a unique type of metal seal that utilizes a helical wound spring with layered metal jackets to address these issues. Presentation topics will include the metal-to-metal sealing concept along with design factors such as seating load, seal function, seal material selection, leak rate, and required seating load, groove configuration and finish.