Stretchability of HIPIMS Metal Coatings on TPU Substrate
(Room Room 104-C)
02 May 19
2:00 PM
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2:20 PM
Tracks:
Emerging Technologies
Many stretchable interconnects have been developed for fulfilling practical usage though, it is worth to utilize high power impulse magnetron sputtering (HIPIMS) for fabricating stretchable interconnect, and possibly for stretchable sensing. The plasma induced by HIPIMS system has high plasma density, high degree of ionization and high ion energy, expected to deposit high-quality, strongly adhered and dense brass metal coatings on biocompatible polyurethanes (thermoplastic polyurethane, TPU), thus effectively improve the stretchability (εs: strain within which electrical resistance is stable and εm: stain within which electrical resistance is measurable in a tensile test). Experimental results show that it can increase peak power density when HIPIMS power operated at low discharge frequency and small pulse width. Ultimately, a discharge frequency of 400 Hz and pulse width of 80 μs was determined. The HIPIMS brass on TPU substrate reaches an εm value of 14 % with an εs to be 1%. When subjected to 5 % cyclic strain for 60 cycles, the electrical resistance of the coated sample increased from 20 Ω to 100 Ω. The dot matrix pattern gives no effect to the εm value of the samples but increase εs to a value of 1.6 %. On the other hand, HIPIMS gold deposited TPU sample gives a very high εm value of 35 % and a εs value of 2 %. After performing 5 % cyclic strain for 160 cycles, the resistance of the gold coated film remains stable.