An Excel-Based Tool for Calculating Sputter Rates of Elements and Compounds
(Room Room 104-C)
02 May 19
4:00 PM
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4:20 PM
Tracks:
Emerging Technologies
For many applications in ion-beam sputtering it is useful to know the sputtering yield and the expecting sputter rates of the used combination of ions and target materials. Since the last four decades of research fundamental theories of ion-beam sputtering have been developed and confirmed by several experiments. Based on these well-known theories, especially the semi-empirical formulas formulated by Matsunami et al., Yamamura and Tawara, some improvements of Seah and a lot of published data from sputtering experiments we developed a powerful tool for calculating sputter rates for a wide range of target materials and commonly used ions. Since sputtering yields depend on several parameters, we limited ourselves on energy and angular dependence as well as on the influence of the target temperature. In combination with certain plasma sources for ion-beam sputtering it is a useful tool to predict the resulting sputter rates. Furthermore, comparisons with experimental data allow us to improve the program’s outcome.