2019 SVC TechCon

Low Temperature Synthesis and Fabrication of Large Scale, Flexible, and Stretchable 2D Devices (Room Room 104-C)

02 May 19
5:00 PM - 5:40 PM

Tracks: Emerging Technologies

Low temperature synthesis of high quality 2D materials directly on flexible substrates remains a fundamental limitation towards realization of robust, strainable electronics possessing the unique physical properties of atomically thin structures. Here, we describe room temperature sputtering of uniform, stoichiometric amorphous MoS2, WSe2, and other transition metal dichalcogenides and subsequent large area (>2 cm2) photonic crystallization to enable direct fabrication of two-dimensional material photodetectors on large area flexible PDMS substrates. Fundamentals of crystallization kinetics for different monolithic and heterostructured TMDs are examined to evaluate this new synthesis approach for affordable, wearable devices. The photodetectors demonstrate photocurrent magnitudes and response times comparable to those fabricated via CVD and exfoliated materials on rigid substrates and the performance is unaffected by strains exceeding 5%. Other devices and circuits directly written from photonically annealed monolithic TMDs thin films deposited on large area flexible substrates are also demonstrated.