Roll-to-Roll Sputter Deposition of Low-Resistance Electrodes on Ultrathin Glass
(Room Room 104-B)
02 May 19
11:00 AM
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11:20 AM
Tracks:
Large Area Coatings
Ultrathin glass is a new flexible material. It is distinguished to its polymer counterparts by a couple of outstanding properties. Most importantly, the permeation barrier for moisture and oxygen is virtually infinite. Thus, lifetime problems for organic electronics can effectively be avoided. Further, the possibility to exert heat on the substrate offers considerable advantages for transparent conductive oxides. The paper features the roll-to-roll sputter deposition of indium- tin-oxide (ITO) based transparent electrodes. The deposition technology was the dual anode sputtering from a rotatable ceramic target. The paper provides results for ITO coatings which were either deposited at substrate temperatures of up to 300°C or which were annealed at those temperatures after the deposition. The lowest resistivity of the coatings was 1.6x10-4 Ohm cm, corresponding to a sheet resistance of less than 11 Ohm/square. This value is much better compared to ITO coatings deposited at room temperature or annealed to moderate temperature levels around 150 °C.
However, besides the optical and electrical properties, surface roughness and mechanical stability are crucial properties for the applicability of the substrates.
Various annealing routes were compared. The indium tin oxide properties achieved by room temperature and subsequent annealing were related to those obtained by the deposition on a heated substrate. Besides the transmission, reflection and resistivity, also atomic force microcopy and X-ray diffraction results were included in the discussion. Aspects of the mechanical stability of the coated substrates were considered as well.