2019 SVC TechCon

Sessions Speakers Exhibitors Press Releases Floor Plan Buzz

GRSM Low Maintenance, High Capacity Drop-In Style Rotatable End Block (Room Promenade Lobby)

01 May 19
3:00 PM - 3:10 PM

Tracks: Vendor Innovator Showcase

The Gencoa Rotatable System M – GRSM is a unique and compact design of end-block that combines very low maintenance with a high power and load capacity. The GRSM utilizes a patented in-vacuum rotation means that reduces the in-chamber space requirement and maximizes the possible target length. The sealing method results in a helium leak rate of less than 8.5 x 10-8 mbar l/sec. The power delivery method prevents wear and avoids the maintenance requirements common with alternative designs. The presentation will illustrate various process configurations of the GRSM and the resulting film properties.