Innovative Sputtering Targets for Display and Solar Industry
(Room Promenade Lobby)
01 May 19
1:20 PM
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1:30 PM
Tracks:
Vendor Innovator Showcase
Plansee continuously develops new thin film coating materials for applications in the display, solar, microelectronics and hardcoating industry. Monolithic molybdenum rotary targets can be sputtered up to only 4 mm remaining wall thickness. This results in a higher material utilization compared to conventional bonded-type targets. The results of a 555 h long-term sputtering test are presented. It demonstrates low arcing, stable cathode voltage and consistent thin film properties throughout the lifetime of the target. WTi is a well-known material for application as diffusion barrier. Results of thin film depositions from a WTi rotary target are presented and compared with properties of thin films deposited from a planar target. Highly light-absorbing (dark) MoOx films are used in the fabrication of high-end flat panel displays to cover reflecting areas and provide superior contrast. By addition of elements like Ta or Nb into the target, the wet-etching behavior of the resulting thin films can be tuned to facilitate easy process integration into the current display manufacturing process