Application of HiPIMS on Wear-Resistant and Anti-Corrosion Performance of Functional Coatings
(Room Room 104-A)
30 Apr 19
11:40 AM
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12:00 PM
Tracks:
High Power Impulse Magnetron Sputtering – HIPIMS
With the continuous evolution of industrial applications, the quality requirements for PVD coatings are constantly increasing. High Power Impulse Magnetron Sputtering (HiPIMS) is a new PVD technology which combines magnetron sputtering (MS) with the application of pulsed power methodologies. Compared to conventional magnetron sputtering (MS), HiPIMS reduces the surface arcing of a workpiece and the high-energy ions increase coating density. These process characteristics enhance wear and corrosion resistance; prolonging service life and broadening the range of potential applications.
In this study, we outfitted a HiPIMS power supply on several PVD systems to study the performance of the following coatings: Cr, TiN, TiCN, CrAlN, AlTiN, TiSiN, and TiCrN. These coatings coatings were produced using both planar and rotating cylindrical magnetrons. Scanning electron microscopy (SEM) was used to evaluate the morphology and thickness of the deposited coatings. In conjunction with the scanning electron microscopy (SEM), energy dispersive x-ray spectroscopy (EDS) was used to determine the chemical composition of the coatings. Phase analysis was measured via X-ray diffractometry (XRD). Finally, nano-hardness and Revetest® scratch tests were carried out to assess the mechanical properties of the as-deposited films.