Thick ta-C Coating by Arc Ion Plating: Towards Increase in Property and Productivity
(Room Room 104-B)
30 Apr 19
11:00 AM
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11:20 AM
Tracks:
Heuréka! Post-Deadline Recent Developments
A hydrogen free DLC coating with a high fraction of sp3 bonding, also referred to as ta-C (tetrahedral amorphous Carbon), has been attracting a practical attention, particularly in the automotive industry, due to its superior property of high hardness, wear resistance and a possible superlubrication effect. In deposition process of ta-C coatings in an industrial scale one of the practical challenges is to increase the productivity, i.e. throughput, as much as possible while the property of the coating is sufficiently ensured. In this work we have developed the arc ion plating system equipped with round-bar type cathodes specially designed for ta-C coatings with a high deposition rate for application in an industrial production scale. A stable and continuous arc discharge for more than several hours is sustained either in vacuum or in inert gas atmosphere, enabling to deposit a relatively thick ta-C coating with the thickness of more than 10 mm. Unique features for this system and mechanical and microstructural characteristics for ta-C coatings deposited thereby are demonstrated. The effect of deposition parameters on the coating properties and possible application fields thereof shall also be discussed.