2019 SVC TechCon

High Power Plasma Processes on Temperature Sensitive Substrates (Room Room 104-A)

29 Apr 19
9:40 AM - 10:00 AM

Tracks: WebTech Roll-to-Roll Coatings for High-End Applications

Roll-to roll deposition in one of the most effective coating technologies at all. Counting the coated area, it outnumbers any other vacuum deposition technology. Nonetheless, the majority of the huge production capacity is focused on only a few applications. Well-established combinations between affordable substrates and highly developed coating processes are met in different applications. A typical example are polyethylenterephtalate films, coated with aluminum. Those can be applied in food packaging, as decorative coating as well as for security labels. Novel applications can pose serious problems. In most cases, those problems are related to finding the balance between applying high power powers on one side and handling the heat load on the temperature sensitive substrates on the other side. The coating of extremely thin films for electronics and the coating of fluoropolymer films for outdoor applications are two such examples. The contribution will provide insight into an alternative cooling principle. The new method relies on an adhesive force between the substrates and the cooling surface. It opens a way to solve problems in those cases when the classical approach of intimate contact between film and chilling drum fails to provide acceptable results. The application of the technology will be shown with high-rate reactive and metallic sputtering as well as for processes based on PECVD coating technology.