SEMICON Korea 2019

Sessions Speakers Exhibitors Products Press Releases Floor Plan

Workforce Pavilion - Cleaning & CMP Tutorial (Room #308, COEX)

24 Jan 19

9:00 AM - 12:00 PM

Speaker(s): Ji Chul Yang, Research Fellow / Vice President, SK hynix; Won-Seob Cho, Head of Semiconductor Research, BASF Electronic Materials R&D Center Asia, BASF; Seung-Ki Chae, Professor, Sungkyunkwan University

This tutorial aims to provide a basic course for new engineers who are working at cleaning & CMP technology related area. With this practical lecture from device makers, material suppliers and academia, we expect you will learn the challenges and fundamental technologies in cleaning & CMP process. Too see session agenda, Please Click here

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