SEMICON Korea 2019
Tweet
Sessions
Speakers
Exhibitors
Products
Press Releases
Floor Plan
S5. Contamination-free Manufacturing and CMP Technology
(
Room
#308, COEX
)
24 Jan 19
1:00 PM
-
4:40 PM
Tracks:
STS
Speaker(s):
Jong-young Cho, Senior Engineer, SK hynix;
Dongwan Seo, Senior Engineer, Samsung Electronics;
Yukiteru Matsui, Chief Specialist, Toshiba Memory Corporation (invited);
TaeYoung Kwon, Senior Engineer, Samsung Electronics;
Young-Sik Ghim, Ph.D./Principal Research Scientist/Head, Korea Research Institute of Standards and Science;
Yusuke Oniki, Ph.D. / Researcher (invited), imec;
SunJin Lee, Senior Manager, SK hynix;
David Hera, Semiconductor applications team manager, Syft Technologies
[CMP & Cleaning for Emerging Technology] As IDMs are developing and manufacturing single digit nm devices with 3 dimentions, they need new technologies to overcome its limits and obstacles. It is a challeng not only for IDM but also for suppliers who have to deliver new materials and equipments. These difficulties occurred in CFM and CMP technologies as well. However, we can find the solution for this through collaborations and discussions actively between IDM, supplier and academia. This session will provide excellent 8 presentations from experts to share the breaktrough technologies for CFM and CMP. Too see session agenda,
Please Click here
Home
Sessions
Speakers
Exhibitors
Products
Press Releases
Floor Plan
Tweet
Login
|
Back to top
ChirpE