SEMICON West 2016

Hui-Jung Wu
Director of Engineering, Process Integration
Lam Research


Hui-Jung Wu is currently a director of engineering of the Process Integration group of Lam Research Corporation. His main focus has been the integration and reliability associated with Cu/low k interconnects. Before joining Lam, Hui-Jung worked at Intel and Honeywell where he investigated reliability improvement, light-absorbing/anti-reflecting films and ultra low-k dielectrics development. He received his Ph.D. in chemistry from Rensselaer Polytechnic Institute, and has authored 25 publications and been granted 29 US patents.

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