SEMICON Europa 2016

Martin Sczyrba
Senior Member of Technical Staff
Advanced Mask Technology Center Dresden, Line Engineering


Martin Sczyrba graduated at the Technical University of Dresden/Germany with a Diploma in Physics and a Master of Science by the University of Bristol/Great Britain in 1999. He received a PhD degree by the University of Dresden/Germany in 2003. Subsequently he has joined the Advanced Mask Technology Center in Dresden. There he was responsible for mask unit process and mask lithography simulations in process integration and R&D department. Now, Martin Sczyrba works as a Senior Member of Technical Staff in process integration, being responsible for special mask manufacturing such as e.g. alternating phase-shift masks, special aspects of mask manufacturing and projects in mask-to-wafer integration.



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