SEMICON Korea 2019

Sebastian U. Engelmann
Research Staff Member / Manager of Advanced Plasma Processing group
IBM Research (invited)


SEBASTIAN U. ENGELMANN is currently the Manager of the Advanced Plasma Processing Group at the IBM T.J. Watson Research Center in Yorktown Heights, NY. The Advanced Plasma Processing Group looks at employing plasma research in classic semiconductor applications, as well as new growth areas such as artificial intelligence and quantum computing. Futhermore, he also looks into ways of integrating plasma processes as unique elements in internet of things and/or MEMS applications. He received his Vordiplom in Physics from the University of Würzburg, Germany in 2003 and his Ph.D. in Materials Science and Engineering from the University of Maryland, College Park in 2008. In 2008, he joined the Advanced Plasma Processing Group at IBM. He was promoted to Manager of the Advanced Plasma Processing Group in 2015. He has published over 90 peer-reviewed papers and holds over 25 patents and had numerous invited talks at international conferences. His main research activities were improving the fundamental understanding of plasma-polymer interactions with main focus on 193nm PR resist materials interactions. After that his Research activities grew into developing plasma processes that enable the integration of Trigate and Nanowire device geometries, novel materials (SiGe, III-V etc) or completely new technology apporaches (Photonics, MRAM, packaging etc.) He also has been on the organizing committee of the SPIE advanced nanopatterning conference since 2012, including two years as the conference chair.

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