Manufacturer: Perkin-Elmer | Condition: Fully Refurbished and Upgraded | Wafer Size: Small ~ 6 inch | Wafer loading: Manually, with load lock | Cathodes: Circle Shape/4"~6"/Up to 4 sets | Sputter Methods: DC/RF; Diode/Magnetron | Gas Lines: 1 ~ 3 lines with customized MFCs range