SEMICON West 2016

 

NEW E-grade® “Explore” for process development

The new E-grade “Explore” for Unistats is more than just another function package. E-grade “Explore” visualizes useful information about temperature, heating / cooling capacity and pump capacity in the system directly on the touch panel. E-grade “Explore” is a further development of the Unistat technology and utilizes the outstanding features of Unistats to display important process and performance data directly on the device display. Relevant measurements can also be processed via the digital interfaces. E-grade “Explore” turns a Unistat temperature control unit into a process technology and process engineering development tool. In addition to targeted process optimization and process development, the E-grade allows the estimation of termination criteria and the implementation of use tests and the collection of data for extended process scale-up/ scale-down experiments.