SEMICON West 2016

 

EOR Piezo Rotator: Highest Stability for Nano Positioning Applications

attocube systems, technology leader for nano precise motion solutions is introducing the new EOR rotator. For most nano positioning applications, stability is – apart from highest precision – an essential factor for keeping a target position over long periods even during transport processes. attocube has tailored the EOR piezo rotator stage to guarantee maximum rigidity through highest stiffness.

The EOR6060 piezo rotator is the perfect solution for applications where heavy loads have to be moved. Independently from orientation to gravity, it carries a maximum load of up to 1 kg with almost no tilt of the moving table. The ingenious design offers good concentricity of the aperture regarding the rotational axis as well as a good parallelism of the moving table to the supporting surface.

With a size of 60 x 60 x 23 mm3 the rotation stage offers 360° endless rotation, a free inner aperture of 10 mm and a resolution of 0.01 m°.