SEMICON West 2016

 

Expanded sensor head portfolio for interferometric displacement measurements

attocube's interferometric displacement sensors IDS and FPS (offering 1 pm resolution &10 MHz bandwidth) are now available with new sensor heads. The existing portfolio already includes various options, each one optimized for specific measurement tasks: ultra-compact sensor heads (Ø 1.2 mm) for the use in very confined spaces; versions designed for easy alignment or enabling measurements on a wide variety of materials (glass, aluminum, ceramic etc.).

Two new heads have recently been added to the portfolio: The D12/F2.8 is designed for highly sensitive surface measurements offering a spot size of 2 μm at a working distance of 2.8 mm. Due to its sophisticated design, the M12/C7.6 completely eliminates signal intensity peaks even over large distances of up to 5 m, and is therefore the perfect choice for long range measurements.

The advantage of both sensors lies in the highly flexible usage of their fiber-based sensor heads: the simple plug-and-play nature allows for various set-up configurations and the exchange of sensor heads within seconds.