SEMICON West 2016
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Rotary Feedthrough, Rotary Sealing Unit
Rotary, Reciprocating, Rotary at the same time Reciprocating, Multiple Rotary Co-axial, Muti-axial. ․ Media : Reactive gas, liquids, Etc. Temperature Range : -20℃ ~ + 150℃ without cooling system. ․ In Vacuum : < 10-8 torr. In Pressure : < 15 bar.
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