PVD Products provides custom thin-film deposition systems for small scale, prototype production, and R&D applications. We provide magnetron sputtering and electron beam evaporation systems as well as custom PECVD and PLD tool. Machines include wafer based and reel-to-reel substrates as well as custom modules. PVD prides itself on working closely with our customers to meet their specific needs. We have sold systems to many Fortune 500 companies as well as small start-ups with many repeat customers.
Below are some examples of equipment we have made for customers:
1) IBAD evaporation system for eight 6-inch wafers with heating to 400°C. UHV IBAD evaporation system for eigth 4" wafers with heating to 600°C.
2) Muliple unis of a large sputter deposition tool with a 1 meter diameter, RF biased,and water-cooled substrate stages for oxide coating.
Cluster tools with automated robot handlers.
3) Reel-to-Reel deposition tools for coated conductor technology including PLD, IBAD using both evaporation or sputtering, and standard sputtering for buffer layers or metals. Systems can handle 1 km of tape length. These systems can integrate scanning high pressure RHEED or other diagnostic tools as needed.
Please stop by our booth and learn what unique tools we can make for you.
Product Categories
Design Services
- Deposition system
- Vacuum system
Lasers
- Laser ablation deposition
Vacuum Components
- Heating stages
Vacuum/Plasma Systems
- Evaporation
- Large area
- Laser ablation deposition
- PECVD
- Sputtering
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