VACUUM VALVESAluminum Valves With Aluminum Conflat Flanges: Aluminum Gate Valves mate directly to stainless steel CF flanges. 2.75 to 14 inch O.D. Throttle and open/close actuation.
Gate Valves, Mild Steel, Stainless & Aluminum From 2" to 36" (63 to 900 mm): ANSI, ISO, and JIS Flanges. Bellows or O-Rings stem seal. Metal gasket or elastomer bonnet seal. Million cycle life.
Electric Motor Actuated Gate Valves: No air needed. 115 or 220V, 50/60 Hz. Port sizes from 50 mm to 500 mm, 2 to 20 inch. ANSI, ISO, NW, or JIS Flanges.
Angle Valves: Mild Steel, Stainless and Aluminum: NW-16 to 32" ANSI, ISO and JIS Flanges.
Throttlemaster™ Valves: Isolation and throttling in a single valve from 2 to 20 inch ANSI and 63 to 600 mm ISO.
Rectangular Port Aluminum Valves: For wafers to 300 mm and flat panel displays. Port sizes up to 6 inch X 52 inch (150 X 1300 mm).
VACUUM GAUGES
Wide Range Diaphragm Manometer: 10-5 to 1000 Torr. Designed for CVD and other pump-out and backfill applications. mbar and Pascal available.
Convection Gauges: 10-3 Torr to atmosphere. Linear analog outputs.
Vacuum Switches: ±2 mTorr from 1 to 2000 mTorr; ±1 Torr from 2 to 1500 Torr.
Active Pirani Gauges: with linear 0 to 10 V and 4 to 20 mA outputs. $289.
VACUUM PUMPS & EQUIPMENT
Oil Sealed Rotary Vane Pumps: 50 to 1800 l/min.; 3 to 108 m3/hr.; 1.8 to 64 cfm.
Soft Start Pumps – Pump Pressure Control: Max Pumpdown then slows and maintains desired vacuum setting.
Rotary And Push/Pull In One Feed Through: Shaft diameters from 1/4 to 5/8 inch NW, CF, and pipe thread system connection.
Throttlemaster is a trademark of Vacuum Research. Conflat is a registered trademark of Agilent.
Product Categories
Vacuum Components
- Chambers
- Feedthroughs
- Gauges
- Motion (includes Robotics)
- Pump, mechanical
- Pumps, roughing
- Valves
Vacuum/Plasma Gauges
- Capacitance manometer
- Thermocouple