ULVAC is an international corporation that designs and manufactures equipment and materials for the industrial and research applications of vacuum technology. ULVAC products cover a broad spectrum of markets, with equipment for semiconductor fabrication, flat panel display manufacturing, roll-coating, precision metallurgy and industrial vacuum processes. A complete line of vacuum components is also offered which includes vacuum pumps of all types, helium leak detectors, UHV systems and gauges, RGA’s and thermal analysis instrumentation
Product Categories
Leak Detection
- Equipment sales
Vacuum/Plasma Systems
- Atomic layer deposition (ALD)
- Chemical vapor deposition
- Evaporation
- Large area
- PECVD
- Plasma Cleaning
- Plasma Etching
- Sputtering
Vaporization Materials
- Sputtering targets