HORIBA can deliver the critical control needed for the success in your coating industry manufacturing lines such as Chemical vapour deposition (CVD), Atomic layer deposition (ALD), metal organic chemical vapour deposition (MOCVD), PVD (physical vapour deposition), Plasma enhanced chemical vapour deposition (PECVD) and Diamond layer or Diamond layer coating (DLC). We offer a comprehensive range of fluid control and process monitoring components to improve yield, increase throughput and add value to your Coating Process.
HORIBA has one of the world’s smallest quadrupole mass spectrometers allowing it to operate at a much higher pressures (1 Pa) than the larger traditional systems. This results in a reduction in the need for additional pumping equipment.
Product Categories
Analytical/Testing
- Analytical instrumentation
Deposition Rate Monitoring/Control
- Optical emission spectroscopy
Gas Supplies & Handling
- Gas Distribution
Mass Flow Measurement/Control
- Mass flow controller
- Mass flow monitor
- Optical Emission Spectrometry
Plasma Diagnositics
- Optical Emission Spectrometry
Process Monitoring and Control
- Gas and gas mixtures
- Optical emission spectroscopy