SINGULUS TECHNOLOGIES – Innovations for New Technologies
SINGULUS TECHNOLOGIES develops technologies for economic and resource-efficient production processes. The applications include vacuum thin-film coating, surface engineering, wet-chemical as well as thermal process technologies. SINGULUS utilizes its know-how in the areas of automation and process technology in order to develop new attractive work areas with innovative products next to the application areas of costumer goods, energy, entertainment, medical technology and semiconductor.
SINGULUS TECHNOLOGIES is a recognized supplier for new photovoltaic machine concepts and production processes for crystalline and thin-film solar cells, which increase the efficiency of solar cells and reduce their production costs. In semiconductor SINGULUS TECHNOLOGIES is a renowned manufacturer of advanced thin-film deposition equipment for magnetics, MRAM, thin-film head, and other semiconductor applications. The systems offer a reliable deposition of ultra-thin metallic and insulating films down to a thickness of one nanometer and below and stacks of such films with very precise material thickness and high uniformity specifications. For the finishing of surfaces through vacuum coating technology are the applications areas e.g. automobile, health or lifestyle industries. For medical technology, SINGULUS offers machine technology for wet-chemical processes, coating technology processes as well as injection-molding of small plastic parts where high precision and extremely high quality are required.
Sputtering
Modular inline sputter systems for solar, display, semiconductor, decorative and consumer electronic applications. Pilot and high-capacity systems with particle-free vertical & horizontal substrate transport.
Evaporation Technology
Inline and batch evaporation systems (vertical & horizontal) for solar, display and consumer electronic applications.
PECVD Technologies
Fully automated PECVD systems using high-performance PECVD technology for frontside and backside passivation.
Ultra-High Vacuum Thin Film Deposition
R & D, Pilot & production systems for semiconductor applications like sensor, magnetic layers & MRAM
Product Categories
Reclamation Services
- Sputtering target
Vacuum/Plasma Systems
- Atomic layer deposition (ALD)
- Chemical vapor deposition
- Evaporation
- Large area
- PECVD
- Plasma Cleaning
- Plasma Deposition
- Plasma Etching
- Sputtering