Supplier of Vacuum Deposotion and Etch Systems for HVM, R&D and Pilot. Products include PVD, EVAP, PECVD, ALD, ARC Vacuum Deposition and Etch/Srip Tools. Available in In-Line, Cluster with Full Automation for any substrate size upto 2300MM. Supplying Equipment to Solar Cell, Semiconductor (Packaging), FPD, HDI, Hard DIsc, Automotive, ThinFilm Batteries, OLED, and LED Lighting. Turn Key Automation. Descrete Pieces and Roll to Roll. Contact us for details of our latest products including "Spatial ALD" and Volume Sputtering tool for Solar Cell and Volume Sputter tool for Semiconductor/Packaging for 200 and 300 mm wafers with "SOFT ETCH".
Product Categories
- Arc Vapor
- Atomic layer deposition (ALD)
- Chemical vapor deposition
- Evaporation
- Large area
- PECVD
- Plasma Deposition
- Plasma Etching
- Sputtering
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