101 Equipment Company, for over ten years, has provided repairs and support for wafer fab customers, OEM's, rebuild companies and brokers, keeping their legacy semiconductor robot equipment running reliably. We have moved to a 2X larger facility. Over 100 customers worldwide are saving money and time by repairing and refurbishing their wafer handling equipment with us due to our competitive pricing and quality equal to or better than the original manufacturer.
We repair, buy, and sell:
- Brooks MAG 7 and VTR / MTR-5 high vacuum robots and InLigner pre-aligners
- Brooks VCE-2, VCE-3, VCE-4, and VCE-6 vacuum cassette elevators
- Complete Brooks cluster tool platforms, including GX-8000, MX-700, M-600, and M-400
- Brooks Reliance ATR-8 atmospheric robots, pre-aligners, and Series 8 controllers
- Brooks Accutran ATR-7 atmospheric robots, pre-aligners, and Series 7 controllers
- Brooks 300mm EFEM units, configured to your specifications
- Equipe/PRI/Brooks ATM- and ABM-100, -200, -300, and -400 series atmospheric robots
Visit 101 Equipment Company Inc. in booth 635 with your complimentary registration to SEMICON West 2016
Product Categories
207 Process Equipment
- Transfer Systems for Wafer; Reticles or FPD's
401 Sub-systems
- Handling; Transfer; Loading Systems; Lifting devices
502 Material Handling Systems
- Robotics; Transfer Systems
700 Manufacturing Services
- Repair; Rebuild; Install Equipment; Maintenance Svcs; Spares
- Used; Rental Equip; Inventory Reduction; Brokers; Resellers
701 Manufacturing Services or Consulting
- Automation & Robotics
- Wafer Handling
900 Support Products
- Device; Wafer; Display Panel Handling Products