Since 1946, Brooks Instrument has been a leader in precision fluid measurement and control technology with a proven history of innovation and the world’s largest installed base of mass flow controllers. Brooks global factory certified service and support for all products, including our legacy brands - Tylan, Unit, Mykrolis and Celerity – ensures optimum performance throughout the life of your instrumentation.
Visit our booth to learn more about GF100 Series MFCs now enhanced with the high-speed EtherCAT interface. The fastest and most accurate MFCs available have also just been improved with better zero stability, reduced valve leak-by and enhanced pressure transient insensitivity.
Our portfolio includes:
- Ultra-high purity mass flow controllers and meters
- High-accuracy liquid mass flow controllers
- Capacitance manometers and pressure control products,
- Precursor vapor delivery systems, and
- Purge meters
Brooks Instrument has manufacturing locations, sales, and service offices in the Americas, Europe, and Asia. For more information on flow solutions, products, or sales contacts please visit
www.BrooksInstrument.com.
Product Categories
101 Photovoltaic Device Manufacturing
- PV: Cells
- PV: Modules
- PV: Stand-Alone Systems
- PV-Building-Integrated Solutions
- Solar Thermal
202 Other Equipment
- Space simulation; Vacuum chambers
- Vacuum drying & out gassing Systems
204 MEMS Equipment
- Deep RIE etching; Dry Etching
206 PV Equipment
- Cells
- Thin Film
- Wafers
207 Process Equipment
- Deposition; (CVD, PVD, ALD, Plating)
- Deposition; PVD; Sputtering; Evaporation Equipment
- Epitaxy Equipment
- Etching; Stripping; Ashing - Dry and Wet Equipment
- Ion Implantation Equipment
- Ion; E-Beam Milling Etching Equipment