SEMICON Europa 2016

Samco Inc. 

Booth 815

Fushimi-ku Kyoto, Kyoto  
      Japan

Since its founding in 1979, SAMCO has been focused on providing cutting-edge thin-film process equipment and process knowledge to our customers, partnering with them to meet the next generation device challenges. 



SAMCO develops and manufactures a wide variety of deposition (PECVD), etching (ICP, RIE, DRIE), and surface treatment (Plasma and UV-Ozone Cleaning) systems for both production and R&D applications. 



SAMCO provides process expertise and turnkey systems to major manufacturers world-wide in the compound semiconductor, optoelectronics, MEMS and other industries. SAMCO's global sales and service network throughout Europe, the Americas, and Asia allows us to be your Global "Partners in Progress".


Product Categories

204 MEMS Equipment
- Deep RIE etching; Dry Etching

206 PV Equipment
- Thin Film

207 Process Equipment
- Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
- Etching; Stripping; Ashing - Dry and Wet Equipment

208 Test Equipment
- Failure Analysis Systems