SENTECH Instruments GmbH develops, manufactures, and sells advanced RIE and ICP-RIE Plasma Etchers. PECVD and ICPECVD Deposition Systems are offered for wafer sizes up to 300 mm diameter. They offer low damage, high rate, and low temperature processing for the manufacturing of quantum devices, semiconductor lasers and diodes, very high frequency devices, refractive and diffractive micro optics, and micro electromechanical devices. Latest developments were made in the field of Atomic Layer Deposition (ALD and PEALD).
SENTECH is a world leader in Thin Film Measurement equipment. A broad range of Reflectometers, Laser Ellipsometers, and Spectroscopic Ellipsometers is offered to measure film thickness and index of refraction. SENTECH is especially successful on the field of thin film measurements for photovoltaic applications.
Based on a highly qualified service department and a large distributor network, SENTECH offers an excellent service worldwide.
Product Categories
203 Inspection & Measurement Products
- Film Thickness; Thickness; Uniformity Measurement; Ellipsometer
- Resistivity Measurement; 4 point probe; Sheet resistance
- Stress; Refractive Index; Reflectivity & Conductivity Measurement
204 MEMS Equipment
- Deep RIE etching; Dry Etching
206 PV Equipment
- Inspection and Metrology
207 Process Equipment
- Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
- Etching; Stripping; Ashing - Dry and Wet Equipment
402 PV Systems
- Measurement and Control Technology