The Front-End division of ASM International N.V. is a leading worldwide designer, manufacturer and marketer of wafer processing equipment in both Front-End-Of-Line (FEOL) and Back-End-Of-Line (BEOL) including single-wafer Epitaxial systems, vertical batch CVD/Diffusion systems, single-wafer Plasma Enhanced CVD and ALD systems (PECVD/PEALD).
Product Categories
202 Equipment, General Use
- Heating; Annealing; Curing Equipment - Furnaces; Conveyors; Ovens; Test Chambers; Heat Treating
207 Equipment, Process
- Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
- Epitaxy Equipment; Epi Reactors; Molecular Beam Epitaxy (MBE); Atomic Layer Epitaxy (ALE)
- Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment
902 Other
- Other