LINTEC has been producing the best products in the field of gas and liquid control for the past 30 years. The world's first digital type MFC was produced and applied to semiconductor and display equipment. In the liquid solution field, LINTEC has more than 20 different vaporizers, LMFC and LMFM. End-users in Semiconductor and Solar production field can be applied to high-K, low-K and plasma deposition by using the liquid solutions. It is making two or three new products every year and is currently used in CVD and ALD equipment used in the Thin Film process. Heat Exchanger, Heating Filter, and Control Valve are also used in various Liquid Vapourizing systems. LINTEC promises to provide the best gas, liquid control solution.
Product Categories
101 Photovoltaic Device Manufacturing
- PV: Cells
201 Equipment, Flat Panel Display
- Anodic Oxidation Equipment
- Seal Patterning Equipment
202 Equipment, General Use
- Heating; Annealing; Curing Equipment - Furnaces; Conveyors; Ovens; Test Chambers; Heat Treating
- Repair; Rework Equipment
206 PV Equipment
- Thin Film
207 Equipment, Process
- Chemical Mechanical Polishing (CMP); Electro Polishing, Mechanical Polishing Equipment
- Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
- Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
- Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
- Epitaxy Equipment; Epi Reactors; Molecular Beam Epitaxy (MBE); Atomic Layer Epitaxy (ALE)
- Etching; Stripping; Ashing - Dry and Wet Equipment
- Spin on Glass (SOG); on Dielectric (SOD) Track systems
- Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment
400 Components, Parts & Accessories
- Flow Control Components - Valves; Meters; Gauges; Regulators; MFC's
- Piezo Electronic Components
401 Sub-systems
- Gas; Liquid delivery panels as subsystems
500 Factory Monitoring & Control Systems (FMCS)
- Gas Handling - Cabinets; Control; Supply Systems