SEMICON Korea 2019
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Mechanical Dicing Saw
FST (Fine Semitech Corp.)
(
Booth
D716
)
The dicing saw uses a high-speed spindle with blades to dice, cut or groove wafers, silicon, glasses, ceramics and many other types of materials.
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CD Meter (CD Meter Measurement System)
FST (Fine Semitech Corp.)
(
Booth
D716
)
CD Meter equipment, the system is purposed in measuring the critical dimension of 6th generation midsize OLED panels.
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EUVO ™ (EUV Light Generation System)
FST (Fine Semitech Corp.)
(
Booth
D716
)
Light source fabrication technology of EUV (13.5nm) wavelength
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Chiller
FST (Fine Semitech Corp.)
(
Booth
D716
)
The Chiller of FST is an equipment that improves process efficiencies by constantly maintaining inside-chamber wafer and its surrounding temperatur...
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Pellicle
FST (Fine Semitech Corp.)
(
Booth
D716
)
A pellicle is a thin membrane stretched over an aluminum frame and glued to the photomask to protect it from contaminants, such as particles.
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