SEMICON Korea 2019
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SPTS Technologies
 
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Sigma® Deposition Systems
The Sigma product range supports wafer sizes from 100mm to 300mm with deposition technologies covering conventional PVD through to MOCVD
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Omega® Etch Systems
SPTS offers advanced etch technologies for a wide range of applications within MEMS, Advanced Packaging, LEDs, high speed RF IC & power semiconductors
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Delta® Deposition Systems
SPTS's Delta PECVD systems are used for a wide range of applications within MEMS, compound semiconductors, and advanced packaging
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